摘要
动态响应的迟滞非线性是影响压电陶瓷驱动器高精度控制性能的一个重要因素,必须在控制中加以动态校正补偿。但由于驱动器的材料、结构和工作条件各异,所以关于动态非线性的定量描述难以建立一个统一的数学模型。针对这个问题,将PID参数的模糊自调整算法应用于微位移工作台,建立了一个动态特性的闭环校正控制系统,真正实现了工作台的快速响应。
Because the delay and non-linearity of dynamic response are vital causes which affect the high-accuracy control character of piezoelectric-ceramic unit,dynamic adjustment and offset should be added in operation?But the differences of material?construction and work condition of actuator lead to difficulty of setting up a standard mathematic model to precisely formulate the dynamic non-linearity character.In order to settle this problem,this paper adapts fuzzy self-adjustment algorithm of PID-parameter into the control of micro-displacement worktable,constitutes a closed-loop system of dynamic adjustment, and offset and realizes rapid response of micro-displacement worktable.
出处
《压电与声光》
CSCD
北大核心
2005年第2期203-205,212,共4页
Piezoelectrics & Acoustooptics
基金
陕西省自然科学研究基金资助项目(2002E207)
关键词
压电陶瓷微位移驱动器
动态特性
PID
模糊自调整
微位移工作台
micro-displacement actuator of PZT
dynamic response quality
PID
fuzzy self-adjustment
micro-displacement worktable
