摘要
通过测定紫外激光烧蚀Ａｌ靶诱导等离子体的发射光谱，研究了激光烧蚀Ａｌ靶的溅射过程和烧蚀环境气体对发射光谱强度的影响，提出电子碰撞激发模型，定性解释了烧蚀环境气体对等离子体发射光谱的增强效应。
Measurements of optical emission from the ablation plume of metal Al by XeClexcimer laser are reported.The effects of the surrounding atmosphere pressure(argon,and helium)over the range 13.3Pa to 101.3kPa on optical emission was studied. The results are qualitatively explained using a simple model based on optical emission arising from inelastic collision between the elemental species and electron with high.kinetic energy.
出处
《应用激光》
CSCD
北大核心
1994年第2期55-58,共4页
Applied Laser
基金
国家自然科学基金
关键词
紫外激光
激光烧蚀
发射光谱
铝
UV laser
Laser ablation plasma
atomic emission spectra
Aluminium.
