摘要
利用EPMA和XRD的分析方法,研究了Si_3N_4陶瓷材料表面氧化层的组成。结果表明,Si_3N_4陶瓷材料表面的氧化层,是由方石英相和含有Al_2O_3、CaO等杂质的SiO_2玻璃相所组成。其中SiO_2玻璃相中Al_2O_3、CaO等杂质的含量,随着氧化时间的增加而逐渐增加。
Surface oxidation layer of Si3N4 ceramics has been investigated with EPMA and XRD. The results indicate that the surface oxidation layer is constituted of cristobalite and a glass phase containig SiO2 with impurities such as A12O3 and CaO. The contents of these impurities increase with the increasing of oxidation time.
出处
《现代技术陶瓷》
CAS
1994年第1期39-42,共4页
Advanced Ceramics
关键词
氧化层
氮化硅陶瓷
EPMA
Silicon nitride Oxidation layer electron probe microarea analysis
