摘要
用射频磁控溅射技术，在玻璃衬底上制备出纳米级ＰＬＺＴ薄膜．ＸＲＤ、ＴＥＭ分析表明，薄膜为纯钙钛矿结构，平均粒径为２～５ｎｍ．Ｒａｍａｎ光谱表明，纳米级晶粒尺寸使得薄膜的Ｒａｍａｎ峰向低波数方向移动．
Nanocrystalline PLT thin films have been prepared on glass substrates by RF magnetron sputtering.TEM and XRD analyses indicate that PLT thin films with perovsikte structure are comprised of 2￣5nm grains. Raman peaks shift towards a low frequency region due to nano grain size in PLT films.
出处
《无机材料学报》
SCIE
EI
CAS
CSCD
北大核心
1994年第3期371-374,共4页
Journal of Inorganic Materials
基金
攀登计划A资助
关键词
纳米
PLT薄膜
铁电体
射频磁控溅射
nanocrystalline material, PLZT thin film, RF magnetron sputtering
