摘要
以金属钛为靶材,采用射频磁控溅射方法制备纳米晶粒TiO2 薄膜。利用扫描电镜、紫外-可见光谱仪、X射线衍射仪研究不同热处理温度下制备的纳米晶粒TiO2 薄膜的结构及表面形貌。实验结果显示,用射频磁控溅射得到的纳米晶粒TiO2 薄膜与衬底结合紧密,薄膜表面致密、平整,经 550℃晶化的纳米晶粒TiO2 薄膜为均一的锐钛矿相,具有良好的紫外光吸收率。
Nano-grain TiO_2 thin films are fabricated by magnetron sputtering process from a pure 99.99% Ti disk. The micro-structure and surface morphology are examined by using SEM、VU-VIS transmission spectrum and XRD. The results illustrate that the surface of nano-grain TiO_2 film is compact and smooth. The films remain completely the anatase phase and show better photocatalytics after being annealed to 550℃ in the air for an hour.
出处
《黑龙江大学自然科学学报》
CAS
北大核心
2005年第1期103-106,共4页
Journal of Natural Science of Heilongjiang University
基金
黑龙江省教育厅计划项目(10531129)
