摘要
A 1×8 multimode interference power splitter with multimode input/output waveguides in SOI material is designed by the beam propagation method and fabricated by the inductive coupled plasma etching technology for use in fiber optics communication systems.The fabricated device exhibits low loss and good coupling uniformity.The excess loss is lower than 0 8dB,and the uniformity is 0 45dB at the wavelength of 1550nm.Moreover,the polarization dependent loss is lower than 0 7dB at 1550nm.The device size is only 2mm×10mm.
一个适用于光纤通信系统中的 1× 8多模干涉功率分束器被设计并通过ICP刻蚀方法成功研制 .这种基于SOI材料的功率分束器是采用多模波导作为输入 /输出波导 ;经过光束传播方法模拟 ,该器件显示出了优良的性能 .测试结果表明 ,在 15 5 0nm波长处器件的传波损耗低于 0 80dB ,损耗均匀性为 0 4 5dB ,而且偏振相关损耗低于0 70dB .器件的尺寸只有 2mm× 10mm .
