摘要
基于MEMS工艺,用硅橡胶制作了光栅常数可变型光栅,可用于光学MEMS器件中的关键部件,给出了可调谐光栅的详细制作工艺。经ANSYS对硅橡胶衬底光栅的弹性模量动态模拟,结果显示本光栅具有良好的线性响应。
By virtue of MEMS processes, silicone rubber can be used to form a tunable grating, which is one of the important optical MEMS devices. This paper provides the fabricating processes of grating in details. Finally, the results of ANSYS simulation show that the silicone rubber membrane has a good linear response.
出处
《微纳电子技术》
CAS
2005年第3期126-128,138,共4页
Micronanoelectronic Technology
基金
国家863高速光通信滤波器项目(2003AA312070)
