摘要
本文运用希尔伯特变换空间调制器使十字光栅一级衍射谱的强度分布用于精密定位。模拟实验结果表明;本方法调节得当,定位精度可达10^(-4),因而可用于检测导轨或工作平台的平直度。
Using a Hilbert transform Modulator, the intensity distribution of first-order spectrum of crossed-slit is used for accuracy positioning in practice. Simulating experimental results show with care this method will give an accuracy of better than 10^(-6) and can be applied to test the flatness of guideway or platform,
出处
《苏州大学学报（自然科学版）》
CAS
1989年第2期186-189,共4页
Journal of Soochow University(Natural Science Edition)
