摘要
提出了一种精密调节激光烧蚀速率的方法——双光束技术,得到了比单光束技术约高两个数量级的调节精度。对这种双光束调节的机制进行了解释。
A two-beam technique has been presented as a new method to adjust laser-ablation rate. An adjust accuracy of about two orders of magnitude higher than that in usual one-beam technique was obtained. The mechanism of the two-beam adjusting is explained in terms of the calculation result of surface temperature increase in laser heating.
出处
《四川大学学报（自然科学版）》
CAS
CSCD
1989年第1期54-57,共4页
Journal of Sichuan University(Natural Science Edition)
关键词
激光烧蚀
精密调节
双光束
激光仪
laser-ablation rate, line adjustment, two-beam technique, fused SiO2 .
