摘要
热力学计算表明，Ｈ＿２、Ｎ＿２的过量有助于提高ＴｉＮ的产率，但能耗也相应增加。为此考察了温度、流量、ＴｉＣｌ＿４携带量、混合方式对产物性能的影响。结果表明，流量增加、温度升高、ＴｉＣｌ＿４携带量增加、混合愈好，则产物粒径愈小。在此基础上采用微波等离子体化学气相沉积法，合成了粒径为１２３～２８４ｎｍ的ＴｉＮ超细颗粒。
Theimodynarnic calculation verified that the over ratlo of H_2, N_2 to TiCl_4 ishelpful for the increase of the yield of TiN but make energy consume higher in while.Effectsof temperature,flowrate of reacts and method of mixing on the properties of TiN product areinvestigaled.Ultrafine TiN particles with volume diameter of 123～284 nm are synthesized via microwave CVD process.
出处
《华东理工大学学报（自然科学版）》
CAS
CSCD
1994年第2期141-144,共4页
Journal of East China University of Science and Technology
基金
国家自然科学基金
关键词
氮化钛
超细粉
化学气相沉积
titanium nitride
mierowave
ultrafine powder
chemical vapour deposition
