摘要
报道了利用带SF6气体池受激布里渊散射位相共轭Nd:YAG激光器对0.1mm厚的刀片进行了微孔加工试验.初步实验结果表明,利用该激光器小的光束发散角这一优点,可加工出出口孔径为20μm的微孔.
Using the Nd: YAG laser with the SBS-phase conjugate mirrow based on SF6 gas, the laser drilled hole on a 0.1 mm thik blade has been reported in this lecture.The primary experimental results show, that the fine hole with the exit diameter of 20 μm and the entrance diameter of 30 μm has been obtained due to the small laser beam divergence of this SBS-phase conjugate laser.
出处
《光学学报》
EI
CAS
CSCD
北大核心
1994年第8期894-896,共3页
Acta Optica Sinica
基金
国家教委留学归国人员科研基金
关键词
激光加工
激光打孔
微孔
laser drilling, phase conjugate laser.