摘要
本文介绍了一种新型的电容传感器。它不同于以往的平行板式电容传感器，而是利用边缘场效应的原理，设计出的具有宽的静动态测量范围（ｍｍ级）和高精度的测量仪器。它适用于自动化加工过程中的实时测量，具有快速、稳定和小尺寸的特点。文中对这种测量方法的原理，数学推导及实验进行了详细地描述。实验结果表明：这种边缘场电容传感器具有广泛的应用范围。
A new capacitlve sensor is given in this paper.Unlike the traditional parallel-plate capacitive sensor,it is a measuring instrument with the large measuring scale and high accuracy,based on the principle of fringe-field.It is well-suited for applications in automatic manufacturing and in-process measurements with the prop-erties of fast response,rugged construction and small size.In this paper,we give the detail description of the principle of measuring method,mathematical deduction and experiments. Experimental results show that this fringe-field capacitive sensor has a wide area of applications.
出处
《光学精密工程》
EI
CAS
CSCD
1994年第1期49-53,共5页
Optics and Precision Engineering
基金
国家自然科学基金
关键词
边缘场
电容传感器
陶瓷材料
测头
Fring-field,Capacitive sensor,Ceramic material,Probe
