摘要
本文阐述了硅晶体中新施主的产生和影响,着重总结了新施主的基本性质,基本模型和近年来的研究进展。
The formation process of the new donor in Cz single crystal silicon has been described in this paper. The effect of the new donor on the silicon material has been discussed. This paper has presented also the basic behaviours, basic model of new donor and the progress of its research.
出处
《材料科学与工程》
CSCD
1994年第1期13-17,共5页
Materials Science and Engineering