摘要
本文采用溶胶－凝胶技术制备ＬａＰｅＯ３纳米晶薄膜，并摸索出该薄膜的光刻方法，将这一成膜技术与集成电路平面工艺相结合，首次研制出了纳米晶薄膜作为栅极的场效应晶体管气体传感器，它对乙醇具有较高的灵敏度和良好的选择性．
Abstract The LaFeO3 nanocrystalline films(NCF) were obtained by a sol-gel method,and the photoetching method for these films was found. Combining this thin filmtechnology with planar technique of a illtegrated circuit, we have developed a NCF OSFET gas sensor for the first time. This device not only has good sensitivity toethanol, but also has excellent selectivity.
基金
高等学校博士学科点专项科研基金
集成光电子学国家重点联合实验室资助
关键词
气体传感器
纳米晶薄膜
晶体管
Chemically sensitive field effect transistors
Ethanol
Gas absorption
Sol
gels
