摘要
介绍一系列峰形修正的方法——包括本底的扣除、仪器响应函数的修正、非弹性散射影响的消除等,并将其应用于Si(100)表面的俄歇峰形分析中,对于L_(23)VV,L_1L_(23)V峰取得了与理论计算符合很好的结果,从中可以提取出丰富的价带局域电子态信息。
Methods for the correction of Auger lineshape are presented, including background subtraction, deconvolution by instrumental broadening functions and energy loss function. By applying the above processes to the measured Si(100) L_(23)VV and L_1L_(23)V Auger lineshape, we have obtained a good agreement with theoretical results. It is shown that informations related to the local density of states (LDOS) and chemical states can be acquired by employing Auger lineshape analysis(ALA).
出处
《真空科学与技术》
CSCD
1993年第6期367-374,共8页
Vacuum Science and Technology
基金
国家自然科学基金
关键词
俄歇电子能谱
电子谱
峰形
AES
Auger electron spectroscopy, Background, Scattering response function, Fast Fourier transform, Auger lineshape correction
