摘要
为了满足高密度母盘刻录的需要,对母盘刻录中的二级定位(two-stagepositioning)方法进行了研究,采用了直流电机驱动粗定位和压电陶瓷微型驱动精定位相结合的方式。使用双频激光干涉仪检测精定位工作台的位置,并引入比例增益K估计精定位工作台的位移增量,以估算粗定位工作台位置。对二级定位系统的PID控制方式进行了研究,合理选择了控制参数。仿真实验结果表明,PID控制下的二级定位系统对于10nm的阶跃响应的上升时间为20ms,稳态误差绝对值小于0.1nm,可见采用该二级定位方法的系统有快速的定位响应和很高的定位精度,可以满足高密度母盘刻录的需要。
A two-stage positioning method was developed for high-density optical disk mastering. The coarse positioning used a DC motor while the precision positioning used a piezoelectric ceramic actuator. The position of the coarse stage was estimated by the position of the precision stage measured by a dual frequency laser interferometer with the positioning gain estimated by a proportionality coefficient K. The system is controlled by a PID servo. Simulation results show that the rise time of the two-stage positioning system is 20 ms and the absolute value of the steady error is less than 0.1 nm for a 10 nm step input. This accuracy is sufficient for high-density optical disk mastering.
出处
《清华大学学报（自然科学版）》
EI
CAS
CSCD
北大核心
2005年第2期163-165,169,共4页
Journal of Tsinghua University(Science and Technology)
基金
国家"九七三"重点基础研究项目(G19990330)
关键词
母盘刻录
二级定位
压电陶瓷驱动器
PID
仿真
disc mastering
two-stage positioning
piezoelectric ceramic actuator
PID
simulation
