摘要
为了能够利用ZYGO数字干涉仪检测大口径深度高次非球面,提出了一种新的波前补偿方法,即透镜补偿与计算全息相结合. 通过设计实例表明,对于相对孔径为 1: 1. 08的大口径深度高次非球面,利用简单的 2片式透镜补偿器、并与计算全息的-1级衍射波相结合,系统的波前残余误差的均方根 (RMS)值可以控制在 0 .01λ以内. 结果表明,该检测方法具有通用性强,测量精度高等特点,较好的克服了以往各种检测方法的局限性.
A new method for compensating wavefront error is put forward to test large-aperture and high-order aspheres by using ZYGO interferometer, which uses the combination of a lens compensator and a computer-generated hologram (CGH). Examples show that for the large-aperture and high-order asphere with f/number of 1:1.08, the root mean square (RMS) value of its residual wavefront error can be within 0.01λ by combining a simple two piece of lens and the first negative order diffracted wavefront of a CGH as a whole compensator. The result shows that this method holds the characteristics of all-purpose and high precision, and overcomes localizations of other methods.
出处
《哈尔滨工业大学学报》
EI
CAS
CSCD
北大核心
2005年第2期231-233,共3页
Journal of Harbin Institute of Technology
关键词
高次非球面
透镜补偿
计算全息
Computer generated holography
Diffractive optics
Interferometers
Optical testing
