摘要
CCD(电荷藕合器件)是一种在硅集成电路工艺线上制作的图像传感器。本文介绍了 CCD 的基本工作原理和制造的单项工艺,并详细介绍了其关键工艺:氧化、光刻、离子注入,还对各工艺所遇到的问题、相应的解决方法及发展状况进行了阐述。
Super CCD is a kind of new-type image sensor. On the basis of researching the mechanism of eyes vision forming and the characteristic of distribution of image information space frequency, the performance of super CCD is sharply improved by adopting octangle photoelectrical diodes and changing CCD units arrangement, etc. The fundamental and key technologies of super CCD are discussed, and its application is also introduced in this paper.
出处
《传感器世界》
2005年第2期21-24,共4页
Sensor World
关键词
COD
氧化
光刻
离子注入
super CCD
rectangle unit
alveolate arrangement
resolution
signal/noise ratio
dynamic range
