摘要
对Singmund热尖峰溅射模型进行了修正.用平均能量淀积密度近似代替了Singmund热尖峰溅射模型中的表面能量淀积密度近似.并用TRIM87程序对Sb^+,Bi^+轰击银靶的能量淀积过程进行了模拟计算.将计算所得到的平均能量淀积密度代入修正后的Sig-mund热尖峰溅射模型中,所得到的起始热尖峰区尺寸与能量淀积理论相容.
Sigmund's thermal spike sputtering model has been modified by replacing the surface energy deposition density in Sigmund's model with average energy deposition density. The average energy deposition density for the implantation of Sb+ and Bi+ into silver target are calculated using TRIM87 programme. The initial size of the thermal spike region obtained from the modified model is consistent with the energy deposition theory.
出处
《烟台师范学院学报（自然科学版）》
1993年第4期40-43,共4页
Yantai Teachers University journal(Natural Science Edition)
