摘要
本文基于XPS深度剖析的实验结果,提出了两种不依赖于XPS谱议灵敏度因子的XPS深度剖析实验结果的表征方法,并将此二法与其它三种XPS深度剖析表征法进行了比较。
Based on the experimental results of depth-dissection by XPS, two new quantitative ways, which are used to express the result of depth-dissection, independent of sensibility factor of element are advanced and they are compared with another three methods to denote profile of interface in this paper.
出处
《新疆大学学报（自然科学版）》
CAS
1993年第1期41-46,共6页
Journal of Xinjiang University(Natural Science Edition)
关键词
衰征
深度剖析
剖面
XPS
characterization
depth-dissection
profile
XPS
