摘要
主要研究由溅射法制备的Ag超微粒的粒径分布、平均粒径与溅射收集角的关系.我们的结果是:在给定的溅射条件下,不同的溅射收集角,可以得到不同分散度的超微粒,这对制备具有确定分散度的超微粒而言是一个颇有意义的结果.
The relationships among the size distribution, average diameter and the receiving angle of the sputtering of Ag ultrafine particles prepared by the sputtering methods are studied. The result shows that, under a given sputtering condition, the different dispersion ultrafine particles can be obtained at the different receiving angles, which is a meaningful result for the preparation of a gaven dispersion-ultrafine particle-system.
出处
《西南师范大学学报（自然科学版）》
CAS
CSCD
1993年第2期127-131,共5页
Journal of Southwest China Normal University(Natural Science Edition)
关键词
溅射法
线度分析
银
超微粒
粒径
sputtering methods
size distribution
sputtering receiving angle
