摘要
叙述了非晶硅半导体的结构、制备方法及特性，介绍了非晶硅在制作光电传感器、色敏传咸器、放射线（Ｘ射线等）传感器及应变传感器等方面的应用。并介绍了这些传感器的大致结构、输出特性及有关的应用．
The structure, preparation and properties of amorphous silicon (a-Si) material were de- scribed. The application of a-Si in sensors, such as photodiode, colour sensor, X-ray sensor and stress sensor etc.,were discussed.
出处
《物理》
CAS
北大核心
1993年第9期545-550,共6页
Physics
