摘要
测试环境的微振动干扰会引起干涉图的抖动,影响移相干涉仪的测量准确.设计了一种内嵌于移相干涉仪的外差测振光路,对干涉仪所受环境微振动进行实时检测;采用单片RF/IF集成芯片对两路40MHz的模拟外差信号直接进行比相,简化了通常使用的数字测相方法.在测得环境振动信息后,运用DSP技术和自适应信号处理的方法,实现了基于PZT移相器的自适应振动控制,实验结果表明干涉仪对幅频积不大于100waves·Hz的环境振动的抑制能力达-39dB.
In temporal phase shifting interferometer, the environmental micro vibration can lead to wobble of fringe pattern that usually results in erroneous surface measurements. In order to actively compensate the external vibration, a heterodyne vibration measurement system is embedded into the interferometer firstly. The real time phase variation, owing to the relative vibration between reference and test wave front, of two analog heterodyne signals up to 40 MHz is directly measured by a one chip RF/IF phase detector that simplified the commonly used digital phase detecting method. With a DSP device and adaptive signal processing technique,the external vibration is compensated by a PZT phase shifter. Test results show this adaptive interferometer works well in the process of external vibration no more than 100 waves·Hz, the vibration suppression factor is up to -39 dB.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2004年第12期1493-1496,共4页
Acta Photonica Sinica
基金
国防军工计量"十五"重点项目资助(项目编号:60803134)
关键词
移相干涉仪
环境振动
外差测振
相位检测
自适应振动控制
Phase-shifting interferometer
Environmental vibration
Heterodyne vibration measurement
Phase detecting
Adaptive vibration control
