摘要
将等离子体浸没离子注入与沉积及射频辉光放电技术相结合,在GCr15轴承钢基体表面制备了碳化钛薄膜,考察了注入脉冲宽度和工作气体压力对薄膜性能和化学组成的影响;利用X射线衍射仪(XRD)、维氏硬度计、多功能摩擦磨损试验机和电化学腐蚀试验装置表征了薄膜试样的相组成、显微硬度、摩擦磨损性能和抗腐蚀性能.结果表明,注入脉冲宽度和工作气体压力对薄膜性能及其组成具有显著影响;GCr15钢经改性处理后抗磨性能和抗腐蚀性能显著改善.这是由于基体表面形成了硬质且致密的TiC薄膜改性层所致.
Titanium carbide films were prepared on AISI52100 steel substrate making use of metal plasma immersion ion implantation and deposition (MePIIID) and radio-frequency glow discharge technique, using acetylene (C2H2) as the working gas and pure titanium cathodic vacuum arc as the metal plasmas source. Thus the TiC thin films were deposited in the intervals between the high voltage bias pulses and the implantation was performed during the pulses. The effect of the implantation pulse width and working gas pressure on compositions and properties of the resulting TiC films as the modified layers were examined, based on the examination of the chemical compositions and microstructures of the TiC films by means of X-ray diffraction. The friction and wear behaviors of the films were evaluated on a pin-on-disc test rig, while the corrosion resistance of the films was investigated using an electrochemical corrosion method. It was found that the surface microhardness of the steel substrate was significantly increased after the modification at proper parameters. Therefore, the TiC films as the modified layers had much better friction-reducing and antiwear abilities than the steel substrate. Moreover, the TiC film also had much better corrosion resistance than the steel substrate. The compositions and microstructures of the TiC films were closely related to the parameters such as the implantation pulse width and working gas pressure. Thus it was imperative to realize the best surface-modification effect of the steel by properly selecting the parameters for the MePIIID.
出处
《摩擦学学报》
EI
CAS
CSCD
北大核心
2004年第6期493-497,共5页
Tribology
基金
国防预研基金资助项目(7001028).
