摘要
设计并分析了一种新型的以硅为基底、聚酰亚胺为振动膜的微型电场传感器。此种传感器利用了聚酰亚胺耐热、耐腐蚀并具有良好机械性能的特点,采用MEMS技术制造,使其具备体积小、重量轻、功耗低、便于与其他器件集成等特点,而且制作工艺简单,成本较低。本文阐述了此传感器的工作原理,并通过计算机模拟确定了增强信号的方法,同时描述了新型传感器的结构设计和加工工艺过程。
A novel miniature electric field sensor(EFS)using a vibrating polyimide film constructed on the silicon substrate is introduced. Taking account of its high performance of heat-resistance,anti-erosion and mechanical strength,we ch oose polyimide as the material of the vibrating film. Compared to its counterpar ts,the EFS presented here has some advantages such as small dimension,light weig ht,low power consumption,easy to be integrated with other devices and low cost. The working principle,structure design proved by computer simulation and fabrica tion process of the EFS based on MEMS technologies are presented.
出处
《微纳电子技术》
CAS
2004年第12期41-44,共4页
Micronanoelectronic Technology
基金
国家自然科学基金(60172001)资助项目
