摘要
文章作者利用深能级瞬态谱 (DLTS) ,正电子湮灭谱 (PAS)和光致荧光谱 (PL)等谱分析技术研究了六方碳化硅中具有电活性的深能级缺陷 .这些深能级缺陷分别通过不同能量的电子辐照、中子辐照 ,或氦离子注入等产生 .经过研究和分析各种实验测试的相关图谱 ,作者给出了六方碳化硅中一些重要的深能级缺陷在可控辐照条件下产生和退火行为的研究结果以及这些深能级缺陷相关结构的实验依据 .
We have investigated the electrically active deep level defects in n-type 6H silicon carbide through the use of a series of complimentary spectroscopic techniques such as deep level transient spectroscopy, positron annihilation spectroscopy and photoluminescence. The deep level defects were created by neutron irradiation, He implantation and electron irradiation with different energies. After analysis of the information gained from the different types of spectroscopy, as well as consideration of the defect creation and annealing behavior under different controlled environments, we provide experimental evidence for the microstructure of certain important deep level defects.
出处
《物理》
CAS
北大核心
2004年第11期786-790,共5页
Physics
基金
香港特区研究资助局资助
香港大学教育研究基金 (批准号 :70 85 /0 1P)资助项目
