摘要
针对提出的一种光读出热成像系统 ,对其焦平面阵列的光学和热学特性进行了详细的分析 ,主要涉及法布里珀罗微腔两个反射面的反射率、可动微镜的温度响应、噪声等效温差以及响应时间四个方面。理论分析表明 :当法布里珀罗微腔两个反射面的反射率为 0 .5时 ,能获得较大的输出反射光强和反衬度 ,并保证了输出反射光强尽可能地随微镜位移在 0～λ/ 4范围内呈线性变化 ;可动微镜的温度响应值可达 2 .0 5× 10 -4,噪声等效温差为19.5mK ,热响应时间为 1.5 4× 10 -3 s。
Optical and thermal properties of a novel optically readable thermal imaging focal plane array (FPA) are analyzed, including reflectivity of two reflective surfaces of Fabry-Perot micro-cavity, temperature response of movable micromirror, noise-equivalent temperature difference (NETD) and thermal response time. Theoretical analysis indicates that when the two reflective surfaces of Fabry-Perot micro-cavity have same reflectivity of 0.5 better reflective light intensity and modulation degree can be achieved and that reflective light intensity varies linearly with the displacement of micro-mirror in the range of 0～λ/4. Temperature response of the movable micromirror, NETD and thermal response time are estimated as 2.05×10 -4, 19.5 mK and 1.54×10 -3 s, respectively.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2004年第11期1543-1546,共4页
Acta Optica Sinica
基金
国家 973计划集成微光机电系统研究项目(G19990 3310 1)资助课题
关键词
光读出热成像
噪声等效温差
微腔
焦平面阵列
微镜
反射面
响应时间
光学
反射光
光强
photoelectronic technology
optically readable thermal imaging
focal plane arrays
Fabry-Perot micro-cavity
noise-equipment temperature difference
