摘要
为了兼顾测量带宽和灵敏度的要求 ,提出了一种三自由度水平轴硅微陀螺系统 ,此系统由 3个质量块组成 ,质量块 2与质量块 3组合后与质量块 1构成了一个二自由度驱动方向的谐振器 ,再利用该谐振器进行动力学放大 ,得到非谐振状态下的大驱动振幅 .陀螺驱动频率响应曲线有两个谐振尖峰 ,在两峰值之间存在一个较平坦的区域 .当陀螺驱动工作在频率响应曲线的平坦区域时 ,机械增益虽然比工作在谐振尖峰处小 ,但机械增益受频率变化的影响减小 ,驱动频率的工作带宽增加 ,使得对驱动的控制要求相对宽松 .文中给出了动力学放大原理及所设计的陀螺结构的理论计算和仿真值 .
In this paper,a novel lateral micromachined silicon gyroscope of three degrees freedom with inherent disturbance-rejection capabilities is presented, which is based on utilizing dynamical amplification in the 2-DOF drive-direction oscillator to achieve large oscillation amplitudes without resonance.In the proposed system, the first mass and the combinaftion of the second and third masses form the 2-DOF drive-direction oscillator.The frequency response of the drive-direction oscillator has two resonant peaks and a flat region between the peaks.The operation of the device is in the flat region of the response,where the gain is less sensitive to frequency fluctuations.Consequently, by utilizing dynamical amplification in the 2-DOF drive-direction oscillators,the bandwidth of drive frequency is increased,and the sensitivity to structural parameter fluctuations and damping changes is reduced,resulting in relaxation for control requirements of drive circuit.In this paper,the principle of dynamic amplification is presented.Detailed analysis and simulations of the 3-DOF groscope are also presented.
出处
《纳米技术与精密工程》
CAS
CSCD
2004年第3期225-228,共4页
Nanotechnology and Precision Engineering
