摘要
本文介绍了制备化合物半导体材料用的金属有机化合物的合成、提纯、分析及其应用新进展。
This paper reviewed the improvement in the studies of high pure organometallic compounds sued for the growth of compound semiconductors by MOVPE. It includs the preparation, purification and analysis of the organometallic compounds.
出处
《化工进展》
EI
CAS
CSCD
北大核心
1993年第3期1-3,共3页
Chemical Industry and Engineering Progress
关键词
金属
有机化合物
制备
提纯
organometallic compounds, preparation, purification, analysis
