摘要
用 ANSYS 软件对 RF MEMS 接触悬臂开关模型进行力电耦合分析,比较了几种情况下的驱动电压,讨论了驱动电压与杨氏模量、悬梁的几何尺寸和电极面积的关系。在力电耦合分析的基础上对开关进行了疲劳特性分析,得出了开关的循环使用次数并与实验结果进行了比较,分析了数据差别比较大的原因,改进了测试开关寿命的方法。
Several different models of MEMS RF suspended beam contact switches are simulated using ANSYS electrostatic and mechanical energy coupled analysis. We compare the actua- tion voltage in some cases. The dependence of actuation voltage on the Yang’s module, size of cantilever and electrode area in models are concretely calculated. Then based on the electrostatic and mechanical energy coupled analysis we did fatigue analysis for switches, and compared the experi- ment results. The difference between the two groups of data is discussed. The method of testing switch lifetime was improved.
出处
《半导体技术》
CAS
CSCD
北大核心
2004年第10期22-26,共5页
Semiconductor Technology
基金
国家973 计划项目(G1999033105)
国家自然科学基金项目(10374095)
上海- 应用材料研究与发展基金项目(0 3 0 6 )
