摘要
采用磁控溅射技术在有机衬底上低温制备出具有低电阻率和良好附着性的ZnO∶SnO透明导电膜。研究了制备ZnO∶SnO薄膜的结构、成分和光电性质。制备薄膜为非晶结构,有机衬底ZnO∶SnO透明导电膜的最低电阻率约10-2Ω·cm,可见光平均透过率>82%。薄膜中的氧偏离理想化学配比,氧空位是薄膜中载流子的主要来源。
Transparent conducting ZnO∶SnO films with low resistivity and good adhesion were deposited on flexible substrates by magnetron sputtering at room temperature. Characterization and composition of ZnO∶SnO films have been investigated. The deposited films are amorphous. The films deposited on organic substrates have a optimal resistivity 1.3×10^(-2)Ω·cm and the average transmittance in the visible region reachs 82%. There are many oxygen vacancie in the film, which was the dominating source of carrier in the obtained films.
出处
《功能材料》
EI
CAS
CSCD
北大核心
2004年第5期630-631,634,共3页
Journal of Functional Materials
基金
教育部科学技术研究重点资助项目(重点02165)
博士点基金资助项目(20020422056)
