摘要
利用EssentialMacleod膜系设计程序,对溶胶-凝胶法制备的多层光学高反膜的光学特性进行了理论上的研究。通过膜系设计程序计算得到光学特性曲线,分析了多层膜层数、膜层奇偶性和基底对薄膜光学性能的影响,得到性能最优的理论膜系结构。并设计了带有抗激光损伤匹配层的多层光学高反膜,研究了匹配层对高反膜光学特性的影响。以上研究结果将对溶胶-凝胶多层高反射膜的镀制起到重要的指导作用。
The optical properties of highreflected multilayer films that were prepared by SolGel process were studied using Essential Macleod Optical Coating Design and Analysis Program. The optical curves were attained and the optical influences of the layernumber, the layerparity and the substrate were analyzed. The best theoretical filmstructure were attained. And the highreflected multilayer films with high laser damage matchlayers were designed. All of the results have very important meanings to guide the labpreparation of highreflected multilayer films by SolGel process.
出处
《安阳师范学院学报》
2003年第5期18-21,共4页
Journal of Anyang Normal University
