摘要
本文在论述透射电子显微镜物镜球差和色差对电子显微镜分辨率的限制基础上 ,介绍了克服这些限制因素的方法 ,并展示了同时配备有球差矫正器和单色器透射电镜的一些最初结果。
Spherical aberration and chromatic aberrations are two fundamental optical imperfections that restrict the resolution of modern transmission electron microscopes (TEM). Nowadays,it reaches a limit that further development in lens design will inevitably conflict with the increasing demands of the large specimen space for some new applications,such as electron tomography,liquid-He cyro-microscopy and in-situ experiments. The invention of Cs-corrector may solve this dilemma,which greatly increases microscope point-resolution. The further improvement depends on the future Cc-corrector and,partially,the electron monochromator may do its job. After a detailed discussion of the concept of resolutions in transmission electron microscopy and the effects of the optical aberrations,the method of experimentally measuring resolution is introduced. Then the first results based on a 200kV TEM equipped with a Cs-corrector together with a monochromator are shown. Encouragingly,it confirms that the microscope resolution may reach a dimension below 0.1nm in a TEM with mediate voltage.
出处
《电子显微学报》
CAS
CSCD
北大核心
2004年第4期293-297,共5页
Journal of Chinese Electron Microscopy Society
