摘要
本文介绍了一种新型的测量超光滑表面粗糙度的共光路偏振干涉系统。该系统以双折射透镜作为分光元件;采用偏振干涉方法和偏振接收方法对被测光学表面高度变化,实现高灵敏度、非接触探测,垂直分辨率为0.1nm。给出了系统结构,叙述了测量原理。
In this paper,a new common-path polarimetric interfero-meter system for measuring the roughness of super smooth surface is desc-ribed. The system realizes the high sensitivity, non contact measurementfor the height variation of the surface under examination by using the me-thod of polarimetric interference and rec■eiving. It u■es a birefringentlens as beamsplitter and achieves the resolution of 0.1nm. The system ar-rangement it given and the measurement principle is presented.
出处
《光电工程》
CAS
CSCD
1993年第2期57-61,共5页
Opto-Electronic Engineering
关键词
光洁度测量仪器
共光路干涉仪
偏振干涉术
非接触测量
Surface finish measuring instruments
Shared light path interferometers
Polarization interferometry
Non-contact measurement
