摘要
研究了磁悬浮进给机构在进给运动时的磁力耦合现象。进给机构的磁悬浮系统采用了具有自动归中作用的V型导轨结构,保证了机构进给运动的导向精度,可应用于光刻机等精密光机系统,且满足超净无尘及精密定位要求。通过分析机构磁悬浮系统中电磁铁的磁力分布,给出了耦合磁力的计算公式。分析结果表明:磁悬浮系统在其控制过程中存在着磁力耦合,具体表现为:如果进给运动时平台在水平方向发生偏移,那么左右两侧电磁铁的磁力在水平及水平垂直方向将产生相互耦合作用;而垂直方向的偏移不会引起磁力的耦合。在控制系统中引入补偿器后,可使系统解耦,因产生的耦合磁力很微小,可以忽略不记。
The magnetic coupling force existing when a magnetic levitation (maglev) feeding mechanism moves was analyzed. With a V-shaped guide rail in its maglev system and a balance point automatically regressed, the maglev feeding mechanism has a high guiding accuracy, and can be applied to IT manufacturing devices such as laser lithography tools to meet the needs of the super-clean condition and the precision positioning. Then the distribution of the magnetic forces in the maglev system was analyzed, and a set of formulas of the coupling was derived. The results show that the magnetic force coupling exists in the maglev system's controlling process. When the feeding mechanism moves its offset along the y-axis, the magnetic forces of the two magnets along the y-axis and the z-axis must couple each other; but when the feeding mechanism moves its offset along the z-axis, there will be no magnetic force coupling between the two magnets along the y-axis and the z-axis. The magnetic force coupling can be reduced or even be eliminated after a decoupling control with compensation added into the maglev controlling system.
出处
《光学精密工程》
EI
CAS
CSCD
2004年第4期411-414,共4页
Optics and Precision Engineering
基金
吉林省自然科学基金项目(20020621)
中国科学院研究生科学与社会实践创新研究专项资助项目(科发人教字[2002]118号)
关键词
磁悬浮
进给机构
电涡流传感器
磁力耦合
magnetic levitation(maglev)
feeding mechanism
eddy sensor
magnetic force coupling
