摘要
纳米晶固体材料是由粒径小于100nm的微晶颗粒聚集而成的块状或薄膜人工固体,它具有特殊性能。本文采用sol-gel法制备了LaFeO_3纳米晶薄膜,并与集成电路平面工艺相结合,首次研制出了用纳米晶薄膜作为栅控制极的MOS场效应晶体管乙醇敏感元件。
The precursors of LaFeO3 were prepared by sol-gel method and nanocrystalline film of the LaFeO3 were obtained by a solid phase reaction at about 550℃ for 1 hour. The thicknesses of the nanocrystalline films are uniformly distributed, and their crystal sizes are 40-50 nm. Combining this thin film technology with planar technique of integrated circuit, we have developed NCF-OSFET gas sensor for the first time. This device not only has good sensitivity to ethanol, but also has excellent selectivity.
出处
《高等学校化学学报》
SCIE
EI
CAS
CSCD
北大核心
1993年第10期1437-1438,共2页
Chemical Journal of Chinese Universities
基金
高等学校博士学科点专项基金
集成光电子学国家重点联合实验室基金
关键词
铁酸镧
溶胶-凝胶法
纳米晶薄膜
Lanthanum ferrite
Sol-gel method
Nanocrystalline thin film
MOS field effect transistor
Gas sensor
