摘要
对高压放电泵浦的准分子激光放电回路进行了探讨。运用等效电路方法,给出了准分子激光工作气体在击穿放电前后的电路变化规律,同时分析了能量转移效率与回路参数之间的关系,这为设计高效率和稳定可靠的准分子放电回路提供了理论上的参考依据。
The discharge circuit of excimer laser by high voltage discharge pumping was studied theoretically. The variation laws of the discharge circuit are presented, while the relation between the energy transfer efficiency and circuit parameters were analyzed, which are the reference basis for the efficient and reliable discharge circuit design of excimer laser.
出处
《量子电子学报》
CAS
CSCD
北大核心
2004年第4期456-458,共3页
Chinese Journal of Quantum Electronics
