摘要
本文在第一聚光镜焦距为极大的优化条件下,给出了常用的SEM电子光学系统磁透镜最佳安排的计算公式。
The optimal arrangement of the magnetic lenese is one of subjects of the optimal design of EM. In this pa- per, under the optimal condition of the first condenser lens which focal length is maximum, some caculation for- mulas of optimal arrangement of magnetic lenses of general electron optical system of SEM are deduced.
出处
《电子显微学报》
CAS
CSCD
1993年第4期356-361,共6页
Journal of Chinese Electron Microscopy Society
