摘要
提出了多位法误差分离技术读数方程 ,可统一现行的多步法和多点法 .按照对该方程中两类不同误差映射矩阵的处理方式可得到通用的分离操作模式———“首次分离操作”和“二次分离操作” .指出 ,描述了对该方程加权结果的权函数是考察“测量 分离”系统参数设计是否合理的重要手段 .以圆度误差的等角多步法为例 ,分析了其可操作性和实用性 .结果表明 ,等角多步法的分离求解宜用时域法而非频域法 .
The measurement equation for multi position error separation technique is put forward, and the equation is universal for all the current multi step and multi point methods. The universal separation mode,“the first separating operation” together with“the second separating operation” is presented according to the way related to two different error mapping matrices. It is pointed out that the weight function is of consequence to inspect the reasonability of the designated parameter of “measurement separation system”. The operationability and applicability are analyzed via an example of multi step method in roundness error separation. It is concluded that error separating operation with equi angle multi step method is more applicable in time domain than in frequency domain.
出处
《纳米技术与精密工程》
CAS
CSCD
2004年第1期59-64,共6页
Nanotechnology and Precision Engineering
基金
国家自然科学基金资助项目 (50 0 750 56)
关键词
多位法
权函数
误差分离
分离操作
圆度
multi-position method
weight function
error separation
separation operation
roundness
