摘要
通过耦合模理论分析了马赫 曾德干涉(MZI)型波分复用器各结构参数工艺误差对器件串扰的影响,比较了各结构参数的工艺容差性。结果表明,如果串扰要求在-30dB以下,则波导臂长差的容差性为1%,耦合长度的容差性为2%,波导宽度的容差性较好;容差达到0.6μm时,串扰仍然在-58dB;波导间距对工艺精度要求最高,要求误差小于0.03μm。
The coupled-mode theory was adopted to analyze the structure parameters′ influence on the crosstalk and the tolerance of every structure parameter in the Mach-Zehnder interferometric(MZI) demutiplexer.The analysis results gave the tolerable error of every parameter with the crosstalk less than -30 dB.The tolerable errors of the difference between the two waveguide arms and the coupler length are 1% and 2%,respectively.The tolerance of the width of the waveguides is good because the crosstalk is less than -58 dB when the error amounted to 0.06 μm.On the contrary,the distance between the waveguides required very high precision,the error should be less than 0.03 μm.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2004年第6期645-648,共4页
Journal of Optoelectronics·Laser
基金
国家高技术研究发展计划资助项目(2002AA312261)
国家自然科学基金资助项目(69889701)
国家重点基础研究发展规划资助项目(20000366202)
