摘要
A modal theory for gratings of deep grooves and arbitrary shape is developed. The theory is implemented with an algorithm of recursion reflection-transmission coefficient matrix (RTCM). Several cases of plane wave with arbitrary polarization and arbitrary angle of incidence diffracted from gratings of deep grooves and arbitrary profile are calculated. It is found that this method is more accurate, more stable and faster than others.
A modal theory for gratings of deep grooves and arbitrary shape is developed. The theory is implemented with an algorithm of recursion reflection-transmission coefficient matrix (RTCM). Several cases of plane wave with arbitrary polarization and arbitrary angle of incidence diffracted from gratings of deep grooves and arbitrary profile are calculated. It is found that this method is more accurate, more stable and faster than others.
基金
Project supported by the National Natural Science Foundation of China (No. 69888002)
the fund for the State Educational Committee's Returned Scholars.
