摘要
The results of X-ray diffraction (XRD) and high resolution electron microscopy (HREM) show that ball milling at room temperature can induce the polytypic transformation of 6H-SiC→3C-SiC. HREM study reveals that a large number of partial dislocations which play an important role in the transformation can be introduced into SiC crystals during BM by the instant and repeated collisions between balls and powder. The phase transformation follows the route: 6H= (3^+,3^-)→(4^+,2^-)→(5^+, 1^- )→(6^+ ,0^- ).
The results of X-ray diffraction (XRD) and high resolution electron microscopy (HREM) show that ball milling at room temperature can induce the polytypic transformation of 6H?SiC→3C?SiC. HREM study reveals that a large number of partial dislocations which play an important role in the transformation can be introduced into SiC crystals during BM by the instant and repeated collisions between balls and powder. The phase transformation follows the route: 6H=(3+, 3?)→(4+, 2?)→(5+, 1?)→(6+, 0?).
基金
Project supported by the National Natural Science Foundation of China (Grant No. 59671031)
the Committee of Science and Technology Shenyang