Nucleation of Thin Films on Uncoverage Parts of Substrate

Nucleation of Thin Films on Uncoverage Parts of Substrate

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摘要 Uncovered parts on substrate are the source of nucleation of thin films. A series of new correction formulas are given for the well-known theory of thin films.

作者 Shao, QY Fang, RC Liao, Y

机构地区 Univ Sci & Technol China

出处《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 1999年第4期384-384,共1页 材料科学技术（英文版）

分类号 O484 [理学—固体物理]

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Journal of Materials Science & Technology

1999年第4期

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Nucleation of Thin Films on Uncoverage Parts of Substrate

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