摘要
针对高精度非球面检测过程中,测量力对接触式传感器测头测量不确定度的影响问题,本文在建立接触式测头简化结构模型的基础上,分析建立了测杆倾斜、滑动以及弯曲变形对测量精度的影响模型。并通过仿真分析得出了高精度非球面测量过程中接触式测头受非球面相对口径等的影响规律,即,其中测杆的弯曲变形是测量力影响的主要分量。为进一步提高接触式测量的精度奠定了基础。
The effect of measurement force on the accuracy of an ultra-precise contact probe, is difficult to perform in the field of ultraprecise measurement of complex surfaces, especially aspheric measurement. A simplified structure model of contact probe was built. The effect of the slant, glide and bend of the contact probe was analyzed. The simulation indicates that the effect of bend of the contact probe is main.
出处
《航空精密制造技术》
2009年第6期13-16,共4页
Aviation Precision Manufacturing Technology
基金
国防预研重点项目(51318020101)
关键词
测量
接触式测头
测量力
轮廓测量
measurement
contact probe
measurement force
profile measurement
