摘要
为了提高液环式角加速度传感器的环境适应性,本文对器件的结构和制作工艺进行了研究,获得影响器件环境适应性的三大因素,分别是玻璃毛细管的直径、敏感组件内的压强、以及软胶的涂覆方法。通过选取合适的毛细管的直径、敏感组件内的压强,以及正确的软胶涂覆方法,制作的器件在28.5g、5000Hz、低温-45℃随机振动中,输出信号正常率达到90%以上。
For improving the environmental adaptability of the liquid ring angular acceleration sensor,the structure and process of the device are studied and three factors that influence the environmental adaptability of the device,as the diameter of glass capillary,the pressure in the sensitive components and the method of soft coating are found of.Through adopting appropriately the diameter of glass capillary,the pressure in the sensitive components and the method of soft coating,the correct rate of the output signal of the device made is up to 90%in the random vibration of 28.5g、5000Hz、-45℃.
出处
《光电子技术》
CAS
北大核心
2014年第1期41-45,共5页
Optoelectronic Technology
关键词
角加速度
传感器
适应性
angular acceleration
sensitive
adaptability
