摘要
离子探针(Secondary-ion mass spectrometry,SIMS)是一种固体原位微区分析技术,具有高分辨率、高精度、高灵敏等特征,广泛应用于地球化学、天体化学、半导体工业、生物等研究中。本文主要阐明了SIMS技术的原理、类型及其特点,综述了在地球科学方面的某些研究,对比了不同微区分析技术的特点,最后,介绍了SIMS技术在黄铁矿微量元素原位微区分析的应用。
Secondary-ion mass spectrometry,SIMS,is a kind of solid in situ microanalysis technology,with high resolution, high precision, high sensitive characteristics, which is widely used in geochemistry, cosmochemistry,semiconductor industry,biology study,etc. This paper mainly illustrates the SIMS technology principle,different types and characteristics, summarizes some researchs of earth science, contrast the characteristics of different microanalysis technologies. At last,the paper introduced the application of SIMS technology in pyrite trace elements in situ microanalysis.
出处
《中山大学研究生学刊（自然科学与医学版）》
2013年第1期36-44,共9页
Journal of the Graduates Sun YAT-SEN University(Natural Sciences.Medicine)
