摘要
本文论述了一种新型基于垂直干涉的位移传感器 ,该装置在麦克尔逊干涉仪的基础上 ,采用了一个臂 ,参考光与信号光共用一条光纤路径 ,气隙距离为待测距离。系统抗干扰能力很强 ,结构简单。分辨率为 5 nm。
Optic fiber nanometer range displacement sensor has been develop based on reciprocal interfermetry. Its configuration is similar to a Michelson interferometer but with only one of the two arms used. As both the reference and the sensing light waves travel through the same optical path, the air gap is the distance to be measured. The system is excellent immunity to environment perturbations, the configuration is simple. The resolution is 5 nm
出处
《传感技术学报》
CAS
CSCD
2002年第4期330-332,共3页
Chinese Journal of Sensors and Actuators
关键词
光纤
位移传感器
干涉
optic fiber, displacement sensors, interferometry
