摘要
阐述了光电位置敏感器件(PSD)的结构、特点、工作原理及其非线性,提出采用电桥理论分析PSD非线性误差的新方法。在此基础上,采用高精度低温漂高输入阻抗前置放大器、加法器、减法器、除法器等电子元器件,对改进型的2D-PSD的信号调理电路进行了设计与调试;使用连续发射的激光光源、分光器、滤光器等光学元器件,设计了一种消除光束漂移的光学系统。通过对数据采集系统的研究、设计,研制开发出直线度的测评软件与研制的高精度多功能激光准直仪相结合,对直线度进行了实时测试与分析,并给出了实验测试结果及其仪器进一步改进的方法,最后对仪器的应用前景作了展望。
Expound the structure,character,work principle and non-linearity of PSD(Position sensitive detector).A new kind of method which is bridge theory is put forward to analyze the nonlinearity error of PSD.Based on that,use some electric components,for example the high-precision low-temperature drift high input impedance prepositive amplifier,summator,subtracter,divider etc,to design and debug the signal processing circuit of improved PSD;utilize some optical components,for example the continuous emission laser source,beam splitter,filter etc,to design a kind of optical system to avoid beam drift.Through researching and designing the data acquisition system,a straightness test software is developed to combine with the high-precision multi-function laser collimator.In this software the straightness is tested and analyzed on real-time,then the experiment results and some advance method of the PSD are given,in the end this instrument’s application prospects is forecast.
出处
《红外与激光工程》
EI
CSCD
北大核心
2007年第z2期508-512,共5页
Infrared and Laser Engineering
基金
山东省教育厅资助项目(J05C51)
山东理工大学基金资助项目(2004KJM13)
