摘要
介绍了一种制备膜厚为数微米的均匀相和非均匀相(准周期性多层膜)铁电薄膜的有效方法,研究了 PZT 平面波导结构的光波导特性及准周期性多层铁电薄膜的布拉格反射特性。研究表明厚度在数微米的均匀相铁电薄膜膜层致密,棱镜耦合实验表明该铁电薄膜波导层对光波的传播有良好的限定性能。准周期铁电多层薄膜具有良好的布拉格反射特性,周期数为10以上的铁电多层膜样品在室温下具有90%以上的反射率和约40 nm 的反射带宽。
Preparation of a report on the number of microns thickness uniform and non-uniform phase phase (quasi-periodic multilayer films) ferroelectric film an effective method to study the characteristics of PZT planar waveguide structures and quasi-periodic multilayer optical waveguide Bragg reflector ferroelectric thin film properties.Research shows that the thickness of a few microns uniform phase ferroelectric thin film coating compact prism coupling experiments show that the ferroelectric thin film waveguide layer with the optical transmission properties of a good limit.Quasi-Periodic ferroelectric thin film multi-layer DBR has good characteristics for 10 cycles of ferroelectric multilayer samples at room temperature is more than 90% of the reflectivity of the reflection bandwidth of about 40 nm.
出处
《红外与激光工程》
EI
CSCD
北大核心
2006年第z5期119-122,共4页
Infrared and Laser Engineering
关键词
PZT薄膜
准周期铁电多层膜
光波导特性
布拉格反射器
PZT film
Quasiperiodic ferroelectric multiplayer
Optical waveguide properties
Bragg reflector
