摘要
本文提出了用磁控溅射法在石英晶体表面形成 Ti N薄膜 ,研究了 Ti
A method to get thin film TiN by magnetron sputtering on quartz crystal was put forwarded in this article.Performances of thin film Ti N and its frequency deviation feature as a biosensor were studied.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2001年第z1期305-306,308,共3页
Chinese Journal of Scientific Instrument
关键词
磁控溅射
石英晶体
频率偏离
Magnetron sputtering Quartz crystal Frequency devia tion
